MEMS / NEMS 

Microelectromechanical and nanoelectromechanical systems are important areas of study at Birck. Researchers are working on radio-frequency (RF) MEMS, CMOS-MEMS, biomedical devices, wireless interfaces, and physical, chemical, and field sensors, including operation in harsh environments.RF MEMS research focuses on component-level design of high-quality, widely tunable filters, novel filter architectures, circulators, and small antennas as well as materials and transducer research in micromachining of aluminum nitride, lithium niobate, ferroelectrics, GaN, YIG, and 2D van der Waals materials.